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High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain
Oshidari, Yuta, Hatakeyama, Taiki, Kometani, Reo, Warisawa, Shin'ichi, Ishihara, SunaoVolume:
5
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.5.117201
Date:
October, 2012
File:
PDF, 1.84 MB
english, 2012