Texture of the nano-crystalline AlN thin films and the...

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Progress in Natural Science 2015 / 9

Texture of the nano-crystalline AlN thin films and the growth conditions in DC magnetron sputtering

Khan, Shakil, Shahid, Muhammad, Mahmood, A., Shah, A., Ahmed, Ishaq, Mehmood, Mazhar, Aziz, U., Raza, Q., Alam, M.
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Language:
english
Journal:
Progress in Natural Science: Materials International
DOI:
10.1016/j.pnsc.2015.08.006
Date:
September, 2015
File:
PDF, 1.79 MB
english, 2015
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