In-Situ Observation of Initial Stage in Dielectric Growth,...

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Nano Letters 2015 / 09

In-Situ Observation of Initial Stage in Dielectric Growth, and Deposition of Ultrahigh Nucleation Density Dielectric on Two-Dimensional Surfaces.

Park, Jun Hong, Movva, Hema C.P., Chagarov, Evgueni, Sardashti, Kasra, Chou, Harry, Kwak, Iljo, Hu, Kai-Ting, Fullerton-Shirey, Susan K., Choudhury, Pabitra, Banerjee, Sanjay K., Kummel, Andrew C.
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Language:
english
Journal:
Nano Letters
DOI:
10.1021/acs.nanolett.5b02429
Date:
September, 2015
File:
PDF, 2.97 MB
english, 2015
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