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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Alternative Lithographic Technologies IV - Contact-hole patterning for random logic circuits using block copolymer directed self-assembly
Yi, He, Bao, Xin-Yu, Zhang, Jie, Tiberio, Richard, Conway, James, Chang, Li-Wen, Mitra, Subhasish, Wong, H.-S. Philip, Tong, William M.Volume:
8323
Year:
2012
Language:
english
DOI:
10.1117/12.912804
File:
PDF, 1.10 MB
english, 2012