SPIE Proceedings [SPIE Hague International Symposium - The...

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SPIE Proceedings [SPIE Hague International Symposium - The Hague, Netherlands (Monday 30 March 1987)] Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection - Mechanism And Kinetics Of Silylation Of Resist Layers From The Gas Phase

Visser, Robert-Jan, Schellekens, Jack P. W., Reuhman-Huisken, Marian E., van IJzendoorn, Leo J., Stover, Harry L., Wittekoek, Stefan
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Volume:
811
Year:
1987
Language:
english
DOI:
10.1117/12.975598
File:
PDF, 254 KB
english, 1987
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