Nano-laminate vs. Direct deposition of high permittivity gadolinium scandate on silicon by high pressure sputtering
Feijoo, P.C., Pampillón, M.A., San Andrés, E., Fierro, J.L.G.Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.07.045
Date:
September, 2015
File:
PDF, 16 KB
english, 2015