Reliable fabrication of plasmonic nanostructures without an...

Reliable fabrication of plasmonic nanostructures without an adhesion layer using dry lift-off

Chen, Yiqin, Li, Zhiqin, Xiang, Quan, Wang, Yasi, Zhang, Zhiqiang, Duan, Huigao
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Volume:
26
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/26/40/405301
Date:
October, 2015
File:
PDF, 2.02 MB
english, 2015
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