[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Silicon defects characterization for low temperature ion implantation and spike anneal processes
Margutti, Giovanni, Diego Martirani Paolillo,, De Biase, Marco, Latessa, Luca, Barozzi, Mario, Demenev, Evgeny, Rubin, Leonard M., Spaggiari, ClaudioYear:
2014
Language:
english
DOI:
10.1109/IIT.2014.6940014
File:
PDF, 2.26 MB
english, 2014