Creation of guiding patterns for directed self-assembly of...

Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure

Evangelio, Laura, Fernández-Regúlez, Marta, Borrisé, Xavier, Lorenzoni, Matteo, Fraxedas, Jordi, Pérez-Murano, Francesc
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.3.033511
Date:
September, 2015
File:
PDF, 2.27 MB
english, 2015
Conversion to is in progress
Conversion to is failed