Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure
Evangelio, Laura, Fernández-Regúlez, Marta, Borrisé, Xavier, Lorenzoni, Matteo, Fraxedas, Jordi, Pérez-Murano, FrancescVolume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.3.033511
Date:
September, 2015
File:
PDF, 2.27 MB
english, 2015