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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 20 January 2007)] Photon Processing in Microelectronics and Photonics VI - Compact EUV source and optics for direct structuring of surfaces
Bayer, Armin, Barkusky, Frank, Peth, Christian, Töttger, Holger, Mann, Klaus, Arnold, Craig B., Okada, Tatsuo, Meunier, Michel, Holmes, Andrew S., Geohegan, David B., Träger, Frank, Dubowski, Jan J.Volume:
6458
Year:
2007
Language:
english
DOI:
10.1117/12.701971
File:
PDF, 1.47 MB
english, 2007