[ECS 208th ECS Meeting - Los Angeles, California (October...

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[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Characteristics of ZnO Thin Films by Means of Plasma Enhanced Atomic Layer Deposition

Park, Sang-Hee K., Kwack, Ho-Sang, Lee, Jin-Hong, Hwang, Chi-Sun, Chu, Hye-Yong
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Volume:
1
Year:
2006
Language:
english
DOI:
10.1149/1.2209337
File:
PDF, 947 KB
english, 2006
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