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Pixel-based defect detection from high-NA optical projection images
Xu, Dongbo, Fühner, Tim, Erdmann, AndreasVolume:
53
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.53.003866
Date:
June, 2014
File:
PDF, 1.09 MB
english, 2014