Correction of large retardation window effect for ellipsometry measurements using quasi-Newton method
Jin, Lianhua, Kasuga, Syouki, Kondoh, Eiichi, Gelloz, BernardVolume:
54
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.54.002991
Date:
April, 2015
File:
PDF, 867 KB
english, 2015