Femtosecond laser pulses for fast 3-D surface profilometry...

Optics Express 2013 / 07 Vol. 21; Iss. 13

Femtosecond laser pulses for fast 3-D surface profilometry of microelectronic step-structures

Joo, Woo-Deok, Kim, Seungman, Park, Jiyong, Lee, Keunwoo, Lee, Joohyung, Kim, Seungchul, Kim, Young-Jin, Kim, Seung-Woo
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Volume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.21.015323
Date:
July, 2013
File:
PDF, 3.25 MB
english, 2013
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