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Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy
Barnes, Bryan M., Sohn, Martin Y., Goasmat, Francois, Zhou, Hui, Vladár, András E., Silver, Richard M., Arceo, AbrahamVolume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.21.026219
Date:
November, 2013
File:
PDF, 3.47 MB
english, 2013