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Piezoelectric actuation of aluminum nitride contour mode optomechanical resonators
Ghosh, Siddhartha, Piazza, GianlucaVolume:
23
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.23.015477
Date:
June, 2015
File:
PDF, 4.34 MB
english, 2015