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Universal evaluations and expressions of measuring uncertainty for rotating-element spectroscopic ellipsometers
Cho, Yong Jai, Chegal, Won, Lee, Jeong Pyo, Cho, Hyun MoVolume:
23
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.23.016481
Date:
June, 2015
File:
PDF, 1.06 MB
english, 2015