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Tuning the quality factor of split nanobeam cavity by nanoelectromechanical systems
Shi, Peng, Du, Han, Chau, Fook Siong, Zhou, Guangya, Deng, JieVolume:
23
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.23.019338
Date:
July, 2015
File:
PDF, 3.61 MB
english, 2015