Roughness reduction of large-area high-quality thick Al films for echelle gratings by multi-step deposition method
Li, Zizheng, Gao, Jinsong, Yang, Haigui, Wang, Tongtong, Wang, XiaoyiVolume:
23
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.23.023738
Date:
September, 2015
File:
PDF, 2.31 MB
english, 2015