Defect-tolerant extreme ultraviolet nanoscale printing

Optics Letters 2012 / 09 Vol. 37; Iss. 17

Defect-tolerant extreme ultraviolet nanoscale printing

Urbanski, L., Isoyan, A., Stein, A., Rocca, J. J., Menoni, C. S., Marconi, M. C.
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Volume:
37
Language:
english
Journal:
Optics Letters
DOI:
10.1364/OL.37.003633
Date:
September, 2012
File:
PDF, 417 KB
english, 2012
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