Lateral resolution and transfer characteristics of vertical...

Applied Optics 2012 / 04 Vol. 51; Iss. 11

Lateral resolution and transfer characteristics of vertical scanning white-light interferometers

Xie, Weichang, Lehmann, Peter, Niehues, Jan
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Volume:
51
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.51.001795
Date:
April, 2012
File:
PDF, 1.02 MB
english, 2012
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