Multi-interferometric displacement measurement system with...

Applied Optics 2013 / 06 Vol. 52; Iss. 17

Multi-interferometric displacement measurement system with variable measurement mirrors

Chang, Chung-Ping, Tung, Pi-Cheng, Shyu, Lih-Horng, Wang, Yung-Cheng, Manske, Eberhard
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Volume:
52
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.52.003902
Date:
June, 2013
File:
PDF, 1.48 MB
english, 2013
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