![](/img/cover-not-exists.png)
Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser
Maeng, Saerom, Park, Jungjae, O, Byungsung, Jin, JonghanVolume:
20
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.20.012184
Date:
May, 2012
File:
PDF, 930 KB
english, 2012