Study of hybrid driven micromirrors for 3-D variable...

Study of hybrid driven micromirrors for 3-D variable optical attenuator applications

Koh, Kah How, Soon, Bo Woon, Tsai, Julius Minglin, Danner, Aaron J., Lee, Chengkuo
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Volume:
20
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.20.021598
Date:
September, 2012
File:
PDF, 2.58 MB
english, 2012
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