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Polarization control in flexible interference lithography for nano-patterning of different photonic structures with optimized contrast
He, Jianfang, Fang, Xiaohui, Lin, Yuanhai, Zhang, XinpingVolume:
23
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.23.011518
Date:
May, 2015
File:
PDF, 3.01 MB
english, 2015