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Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry
Henn, Mark-Alexander, Heidenreich, Sebastian, Gross, Hermann, Rathsfeld, Andreas, Scholze, Frank, Bär, MarkusVolume:
37
Language:
english
Journal:
Optics Letters
DOI:
10.1364/ol.37.005229
Date:
December, 2012
File:
PDF, 255 KB
english, 2012