High resolution topography utilizing a line scan stereo...

High resolution topography utilizing a line scan stereo vision technique

Chen, Po-Cheng, Chang, Ming, Gabayno, Jacque Lynn, Wang, Xiangning, Liu, Xiaojun
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Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2675-4
Date:
June, 2017
File:
PDF, 2.07 MB
english, 2017
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