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Robust design of a silver-dielectric near-field superlens for photolithography
Moore, Ciaran P., Blaikie, Richard J.Volume:
30
Language:
english
Journal:
Journal of the Optical Society of America B
DOI:
10.1364/JOSAB.30.003272
Date:
December, 2013
File:
PDF, 1.12 MB
english, 2013