Using fixed fiduciary markers for stage drift correction

Optics Express 2012 / 05 Vol. 20; Iss. 11

Using fixed fiduciary markers for stage drift correction

Lee, Sang Hak, Baday, Murat, Tjioe, Marco, Simonson, Paul D., Zhang, Ruobing, Cai, En, Selvin, Paul R.
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Volume:
20
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.20.012177
Date:
May, 2012
File:
PDF, 952 KB
english, 2012
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