Ultralow-loss polycrystalline silicon waveguides and high uniformity 1x12 MMI fanout for 3D photonic integration
Kwong, David, Covey, John, Hosseini, Amir, Zhang, Yang, Xu, Xiaochuan, Chen, Ray T.Volume:
20
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.20.021722
Date:
September, 2012
File:
PDF, 1.61 MB
english, 2012