Evidence of speckle in extreme-UV lithography

Pret, Alessandro Vaglio, Gronheid, Roel, Engelen, Jan, Yan, Pei-Yang, Leeson, Michael J., Younkin, Todd R.

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Volume:

Language:

english

Journal:

Optics Express

DOI:

10.1364/OE.20.025970

Date:

November, 2012

File:

PDF, 2.56 MB

english, 2012

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