Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition
Guo, Chun, Kong, Mingdong, Lin, Dawei, Liu, Cunding, Li, BinchengVolume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.21.000960
Date:
January, 2013
File:
PDF, 1.79 MB
english, 2013