Submicron optical waveguides and microring resonators...

Optics Express 2013 / 03 Vol. 21; Iss. 6

Submicron optical waveguides and microring resonators fabricated by selective oxidation of tantalum

Rabiei, Payam, Ma, Jichi, Khan, Saeed, Chiles, Jeff, Fathpour, Sasan
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Volume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.21.006967
Date:
March, 2013
File:
PDF, 964 KB
english, 2013
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