Extended theory of soft x-ray reflection for realistic lamellar multilayer gratings
van der Meer, R., Kozhevnikov, I.V., Bastiaens, H.M.J., Boller, K.-J., Bijkerk, F.Volume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.21.013105
Date:
June, 2013
File:
PDF, 1.21 MB
english, 2013