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Digital projection photochemical etching defines gray-scale features
Edwards, Chris, Wang, Kaiyuan, Zhou, Renjie, Bhaduri, Basanta, Popescu, Gabriel, Goddard, Lynford L.Volume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.21.013547
Date:
June, 2013
File:
PDF, 1.96 MB
english, 2013