Two-axis MEMS scanner with transfer-printed...

Optics Express 2013 / 06 Vol. 21; Iss. 11

Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

Jeong, Jae-Woong, Park, Bryan, Keum, Hohyun, Kim, Seok, Rogers, John A., Solgaard, Olav
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Volume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.21.013800
Date:
June, 2013
File:
PDF, 3.40 MB
english, 2013
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