MEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing
Pang, Cheng, Bae, Hyungdae, Gupta, Ashwani, Bryden, Kenneth, Yu, MiaoVolume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.21.021829
Date:
September, 2013
File:
PDF, 2.26 MB
english, 2013