Overcoming Si_3N_4 film stress limitations for high quality factor ring resonators
Luke, Kevin, Dutt, Avik, Poitras, Carl B., Lipson, MichalVolume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.21.022829
Date:
September, 2013
File:
PDF, 2.61 MB
english, 2013