Silicon nitride based plasmonic components for CMOS back-end-of-line integration
Zhu, Shiyang, Lo, G. Q., Kwong, D. L.Volume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.21.023376
Date:
October, 2013
File:
PDF, 3.50 MB
english, 2013