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Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide
Qibo, Feng, Bin, Zhang, Cunxing, Cui, Cuifang, Kuang, Yusheng, Zhai, Fenglin, YouVolume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.21.025805
Date:
November, 2013
File:
PDF, 1.51 MB
english, 2013