Short period La/B and LaN/B multilayer mirrors for ~68 nm...

Optics Express 2013 / 12 Vol. 21; Iss. 24

Short period La/B and LaN/B multilayer mirrors for ~68 nm wavelength

Makhotkin, Igor A., Zoethout, Erwin, van de Kruijs, Robbert, Yakunin, Sergey N., Louis, Eric, Yakunin, A. M., Banine, V., Müllender, S., Bijkerk, Fred
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Volume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.21.029894
Date:
December, 2013
File:
PDF, 1.06 MB
english, 2013
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