Metal-semiconductor-metal ion-implanted Si waveguide photodetectors for C-band operation
Souhan, Brian, Grote, Richard R., Driscoll, Jeffrey B., Lu, Ming, Stein, Aaron, Bakhru, Hassaram, Osgood, Richard M.Volume:
22
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.22.009150
Date:
April, 2014
File:
PDF, 2.62 MB
english, 2014