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New parallel wavelength-dispersive spectrometer based on scanning electron microscope
Erko, Alexei, Firsov, Alexander, Gubzhokov, Renat, Bjeoumikhov, Anjuar, Günther, Andreas, Langhoff, Norbert, Bretschneider, Mario, Höhn, Yvonne, Wedell, ReinerVolume:
22
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.22.016897
Date:
July, 2014
File:
PDF, 2.18 MB
english, 2014