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Fizeau-type interferometric probe to measure geometrical thickness of silicon wafers
Jin, Jonghan, Maeng, Saerom, Park, Jungjae, Kim, Jong-Ahn, Kim, Jae WanVolume:
22
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.22.023427
Date:
September, 2014
File:
PDF, 1.01 MB
english, 2014