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An approach to increase efficiency of DOE based pupil shaping technique for off-axis illumination in optical lithography
Zhang, Fang, Zhu, Jing, Yue, Weirui, Wang, Jian, Song, Qiang, Situ, Guohai, Wyrowski, Frank, Huang, HuijieVolume:
23
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.23.004482
Date:
February, 2015
File:
PDF, 2.09 MB
english, 2015