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High-speed high-precision and ultralong-range complex spectral domain dimensional metrology
Bao, Wen, Shen, Yi, Chen, Tao, Li, Peng, Ding, ZhihuaVolume:
23
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.23.011013
Date:
May, 2015
File:
PDF, 5.49 MB
english, 2015