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Barrier-free absorbance modulation for super-resolution optical lithography
Majumder, Apratim, Masid, Farhana, Pollock, Benjamin, Andrew, Trisha L., Menon, RajeshVolume:
23
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.23.012244
Date:
May, 2015
File:
PDF, 2.58 MB
english, 2015