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Optical and compositional properties of amorphous silicon-germanium films by plasma processing for integrated photonics
Hernández-Montero, William W., Zaldívar-Huerta, Ignacio E., Zúñiga-Islas, Carlos, Torres-Jácome, Alfonso, Reyes-Betanzo, Claudia, Itzmoyotl-Toxqui, AdriánVolume:
2
Language:
english
Journal:
Optical Materials Express
DOI:
10.1364/ome.2.000358
Date:
April, 2012
File:
PDF, 1.22 MB
english, 2012