[IEEE 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Montpellier, France (2015.4.27-2015.4.30)] 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Reliability design of thermally actuated MEMS switches supported by V -Beams
Pustan, Marius, Chiorean, Radu, Birleanu, Corina, Dudescu, Cristian, Muller, Raluca, Baracu, Angela, Voicu, RodicaYear:
2015
Language:
english
DOI:
10.1109/DTIP.2015.7161010
File:
PDF, 346 KB
english, 2015