Kinetics and Energetics of Ge Condensation in SiGe...

The Journal of Physical Chemistry C 2015 / 09

Kinetics and Energetics of Ge Condensation in SiGe Oxidation

David, Thomas, Benkouider, Abdelmalek, Aqua, Jean-Noël, Cabie, Martiane, Favre, Luc, Neisius, Thomas, Abbarchi, Marco, Naffouti, Meher, Ronda, Antoine, Liu, Kailang, Berbezier, Isabelle
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Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.5b07062
Date:
September, 2015
File:
PDF, 4.41 MB
english, 2015
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